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Reliability of MEMS /

Contributor(s): Tsuchiya, Toshiyuki | Tabata, Osamu.
Material type: materialTypeLabelBookPublisher: Weinheim : Wiley-VCH, c2008Description: xx, 303 p. : ill.ISBN: 9783527314942; 3527314946.Subject(s): Microelectromechanical systemsDDC classification: 621 Online resources: Click here to access online | Click here to access online | Click here to access online
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ebooks ebooks HEC Digital Library
621 (Browse shelf) Available
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"Testing of materials and devices"--Cover.

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