Reliability of MEMS /
- Weinheim : Wiley-VCH, c2008.
- xx, 303 p. : ill. ;
"Testing of materials and devices"--Cover.
9783527314942 3527314946
Microelectromechanical systems
621
"Testing of materials and devices"--Cover.
9783527314942 3527314946
Microelectromechanical systems
621