| 000 -LEADER |
|---|
| fixed length control field |
00724cam a22002054a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
9783527314942 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
3527314946 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Reliability of MEMS / |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication |
Weinheim : |
| Name of publisher |
Wiley-VCH, |
| Year of publication |
c2008. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Number of Pages |
xx, 303 p. : |
| Other physical details |
ill. ; |
| 500 ## - GENERAL NOTE |
|---|
| General note |
"Testing of materials and devices"--Cover. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Microelectromechanical systems |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Tsuchiya, Toshiyuki. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Tabata, Osamu, |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
http://www.loc.gov/catdir/enhancements/fy0838/2008459617-b.html |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
http://www.loc.gov/catdir/enhancements/fy0838/2008459617-d.html |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
http://site.ebrary.com/lib/hec/detail.action?adv.x=1&docID=10682369&f00=lccn&p00=t1&p00_upper=tp1185 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Books |
