| 000 -LEADER |
|---|
| fixed length control field |
00561nam a2200181 a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
0195136055 (hardcover) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
9780195136050 (hardcover) |
| 100 1# - MAIN ENTRY--AUTHOR NAME |
|---|
| Personal name |
Campbell, Stephen A. |
| 245 14 - TITLE STATEMENT |
|---|
| Title |
The Science and Engineering of Microelectronic Fabrication |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication |
[S.l.] : |
| Name of publisher |
Oxford University Press, |
| Year of publication |
2001. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Number of Pages |
624 p. ; |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Semiconductors--Design and construction |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Microelectronics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Computer engineering |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
http://10.10.170.122:8080/browse/book/24368 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Books |
