Campbell, Stephen A.
The Science and Engineering of Microelectronic Fabrication - 2nd ed. - [S.l.] : Oxford University Press, 2001. - 624 p. ;
0195136055 (hardcover) 9780195136050 (hardcover)
Semiconductors--Design and construction
Microelectronics
Computer engineering
The Science and Engineering of Microelectronic Fabrication - 2nd ed. - [S.l.] : Oxford University Press, 2001. - 624 p. ;
0195136055 (hardcover) 9780195136050 (hardcover)
Semiconductors--Design and construction
Microelectronics
Computer engineering