| 000 | 00724cam a22002054a 4500 | ||
|---|---|---|---|
| 020 | _a9783527314942 | ||
| 020 | _a3527314946 | ||
| 082 | 0 | 0 | _a621 |
| 245 | 0 | 0 | _aReliability of MEMS / |
| 260 |
_aWeinheim : _bWiley-VCH, _cc2008. |
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| 300 |
_axx, 303 p. : _bill. ; |
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| 500 | _a"Testing of materials and devices"--Cover. | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 700 | 1 | _aTsuchiya, Toshiyuki. | |
| 700 | 1 | _aTabata, Osamu, | |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/enhancements/fy0838/2008459617-b.html |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/enhancements/fy0838/2008459617-d.html |
| 856 | 4 | 1 | _uhttp://site.ebrary.com/lib/hec/detail.action?adv.x=1&docID=10682369&f00=lccn&p00=t1&p00_upper=tp1185 |
| 942 | _cBK | ||
| 999 |
_c53512 _d53509 |
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