000 00281nam a22001217a 4500
082 _a670MAD
100 _aMadon,Mare.J
245 _aFundamentals of microfabrication and nanotechnology
250 _aVol: I
260 _aNew York
_bCRC Press
_c2012
300 _a641
942 _cBK
999 _c12238
_d12238