An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams.
By: Maluf, Nadim.
Contributor(s): Williams, Kirt | ebrary, Inc.
Material type:
BookSeries: Microelectromechanical systems series: Publisher: Boston : Artech House, 2004Edition: 2nd ed.Description: xx, 282 p. : ill.Subject(s): Microelectromechanical systems | MicrotechnologyGenre/Form: Electronic books.DDC classification: 621.381 Online resources: An electronic book accessible through the World Wide Web; click to view
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Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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